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Ion beam processing
IBF – Ion Beam Figuring
IBF 5
IBF 100
IBF 200 / IBF 200SE
IBF 300
IBF 350 RE
IBF 450 / IBF 500
IBF 700
IBF 700R
IBF 1000
IBF 1000R
IBF 1500
IBF 1500R
IBF 2000
R-IBE – Reactive Ion Beam Etching
R-IBE 215
R-IBE 450
ISA 200
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Beam Position Monitors
Emittance Scanners
Slit Grid Emittance Scanner
Allison Scanner
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